kxr94 series accelerometers and inclinometers small package - 5x5x1.2mm dfn multiplexed analog or digital spi interface internal 1khz low pass filter low noise lead - free solderability excellent temperature performance high shock survivability low power consumption user definable bandwidth factory programmable offset and sensitivity self - test function features kionix is a registered trademark of kionix, inc. products described herein are protected by patents issued or pending. inf orm ation provided in this document is believed to be accurate and reliable but is not guaranteed. kionix does not assume responsibility for it s u se or distribution. no license is granted by implication or otherwise under any patent or other rights of kionix. kionix reserves the right to c han ge product specifications or discontinue this product at any time without prior notice. ? kionix 2012 all rights reserved january 26, 2012 rev. 2.3 page 1 of 2 these high - performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an asic packaged in a 5x5x1.2mm dual flat no - lead (dfn). the sensor elemen t is fabricated from single - crystal silicon with proprietary deep reactive ion etching (drie) processes, and is protected from the environment by a hermetically - sealed silicon cap at the wafer level. the kxr94 series is designed to provide a high signal - to - noise ratio with integrated temperature compensation that provides excellent performance over temperature. these sensors can accept supply voltages between 2.5v and 5.25v. sensitivity is factory programmable allowing customization for applications requiring from 1.0g to 4.0g ranges. sensor bandwidth is user - definable. the sensor element functions on the principle of differential capacitance. acceleration causes displacement of a silicon structure resulting in a change in capacitance. an asic, using a standard cmos manufacturing process, detects and transforms changes in capacitance into an analog out- put voltage, which is proportional to acceleration. the sense element de- sign utilizes common mode cancellation to decrease errors from process variation and environmental stress. available in analog and multiplexed analog outputs and serial peripheral interface (spi). proprietary technology 36 thornwood dr. - ithaca, ny 14850 usa tel: 607 - 257 - 1080 - fax: 607 - 257 - 1146 - www.kionix.com - info@kionix.com markets applications \\ stability control telematics/gps theft and accident alarms inertial navigation and dead reckoning gesture recognition image stabilization platform stabilization drill orientation cell phones and handheld pdas automotive personal navigation devices cameras and video equipment industrial
performance specifications parameters units kxr94 - 2050 kxr94 - 2353 condition range 1 g 2.0 factory programmable sensitivity mv/g 660 typical (673 max) not applicable 12 - bit operation counts/g not applicable 819 target (835 max) 0g offset vs. temp. mg/c 0.2 typical sensitivity vs. temp %/c 0.01 (xy) 0.02 (z) typical noise density 45 typical bandwidth 2 hz 800 - 3db non - linearity % of fs 0.1 typical % of full scale output ratiometric error % 1.25 (xy) 0.2 (z) typical 3.3v 5% cross - axis sensitivity % 2.0 typical a/d conversion time s not applicable 40 typical spi communication rate 3 mhz not applicable 5 typical power supply v 3.3 standard current consumption ma 0.95 typical operating 1.03 typical a 5 max standby environmental specifications parameters units kxr94 - 2050 kxr94 - 2353 condition operating temperature c - 40 to 85 (consumer/industrial) powered - 40 to 125 (automotive) storage temperature c - 55 to 150 un - powered mechanical shock g 5000 powered or un - powered, 0.5 msec halversine esd v 3000 human body model kxr94 series accelerometers and inclinometers performance specifications the performance parameters below are programmed and tested at 3.3 volts. however, the device can be factory programmed to accept supply voltages from 2.5 v to 5.25 v. performance parameters will change with supply voltage variations. notes 1 custom ranges from 1.0g to 4.0g available. 2 internal low pass filter. lower frequencies are user definable with external capacitors. 3 spi communication rate can be optimized for faster communication. ordering guide product axis(es) of sensitivity range (g) sensitivity offset operating voltage (v) temperature ( c) package ouput kxr94 - 1050 xyz 2 560 (mv/g) 1.4 v 2.8 - 40 to +85 5x5x1.2 dfn mux analog kxr94 - 2050 xyz 2 660 (mv/g) 1.65v 3.3 - 40 to +85 5x5x1.2 dfn mux analog kxr94 - 2283 xyz 2 1000 (mv/g) 2.5v 5.0 mux analog - 40 to +85 5x5x1.2 dfn kxr94 - 2353 xyz 2 819 (counts/g) 2048 counts 3.3 - 40 to +85 5x5x1.2 dfn digital spi kxr94 - 7050 xyz 2 660 (mv/g) 1.65v 3.3 - 40 to 125 5x5x1.2 dfn mux analog ? kionix 2012 all rights reserved january 26, 2012 rev. 2.3 page 2 of 2 hz g / ?
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